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Proceedings Paper

Improved sensitivity in ellipsometry of thin biochemical films by employing sublayers
Author(s): Jinyu Wang; Joseph D. Andrade; Jinn-Nan Lin; Douglas A. Christensen
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Paper Abstract

Ellipsometry is widely used for investigating the optical properties of thin films on planar substrates, including films of adsorbed proteins or polymers. The average thickness and effective refractive index of the adsorbed layer are calculated by measuring the A and 'P ellipsometry parameters. Unfortunately the thickness of the adsorbed protein layers is often too thin to significantly affect the and 'I' parameters. However, using a substructure consisting of an additional sublayer placed between the substrate and the adsorbed layer, we can improve the sensitivities of both and 'P to changes in the adsorbed layer, provided that the thickness of the sublayer is optimized. We show that for a Si02 layer on a Si wafer, the optimum Si02 thickness is about 1350 A when the incident angle is 70 degrees and the wavelength is 6328 A. The materials of the sublayer can be metal, semiconductor and/or dielectric.

Paper Details

Date Published: 1 December 1990
PDF: 7 pages
Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22418
Show Author Affiliations
Jinyu Wang, Univ. of Utah (United States)
Joseph D. Andrade, Univ. of Utah (United States)
Jinn-Nan Lin, Univ. of Utah (United States)
Douglas A. Christensen, Univ. of Utah (United States)

Published in SPIE Proceedings Vol. 1324:
Modeling of Optical Thin Films II
Michael Ray Jacobson, Editor(s)

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