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Proceedings Paper

Reticle inspection equipment productivity increase using SEMI specification for reticle and pod management
Author(s): Ron Taylor; Jack Downey; Jeffrey Wood; Yen-Hung Lin; Bharathi Bugata; Dongsheng Fan; Carl Hess; Mark Wylie
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Paper Abstract

In this work, the SEMI specification for reticle and pod management (E109) with internal reticle library support has been integrated for the first time on KLA-Tencor’s TeronTM and TeraScanTM reticle inspection tools. Manufacturing Execution System scheduling reticle jobs and Automated Material Handling System scheduling to transfer pods simultaneously have also been integrated and tested. GLOBALFOUNDRIES collaboratively worked with KLA-Tencor to successfully implement these capabilities. Both library and non-library scenarios have been demonstrated for comparison in a real production environment resulting in productivity increase of approximately 29% by making use of the library. Reticle re-qualification test cases were used for the comparison in this work.

Paper Details

Date Published: 25 October 2016
PDF: 5 pages
Proc. SPIE 9985, Photomask Technology 2016, 99850L (25 October 2016); doi: 10.1117/12.2241129
Show Author Affiliations
Ron Taylor, GLOBALFOUNDRIES Inc. (United States)
Jack Downey, GLOBALFOUNDRIES Inc. (United States)
Jeffrey Wood, GLOBALFOUNDRIES Inc. (United States)
Yen-Hung Lin, GLOBALFOUNDRIES Inc. (United States)
Bharathi Bugata, KLA-Tencor Corp. (United States)
Dongsheng Fan, KLA-Tencor Corp. (United States)
Carl Hess, KLA-Tencor Corp. (United States)
Mark Wylie, KLA-Tencor Corp. (United States)

Published in SPIE Proceedings Vol. 9985:
Photomask Technology 2016
Bryan S. Kasprowicz; Peter D. Buck, Editor(s)

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