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Proceedings Paper

Effect of beam quality on tilt measurement using cyclic interferometer
Author(s): V. C. Pretheesh Kumar; A. R. Ganesan; C. Joenathan; U. Somasundaram
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Paper Abstract

Accurate measurement of angles is extremely important in various metrological applications. Interferometry has always been an excellent technique for accurate measurements. Several methods have been proposed for accurate tilt measurement using interferometric techniques. Almost all of them use the Michelson configuration which is extremely sensitive to environmental vibrations and turbulences. We know that a cyclic interferometer is extremely stable. Even though it is not sensitive to displacement changes, it is twice sensitive to tilt compared to that of a Michelson interferometer. We have enhanced the sensitivity to measure tilt using multiple reflections in a cyclic interferometer. Since the input beam is collimated, we have studied the effect of aberration of the input beam on the accuracy of tilt measurement. Experimental results on this study are presented in this paper.

Paper Details

Date Published: 28 August 2016
PDF: 7 pages
Proc. SPIE 9960, Interferometry XVIII, 99600H (28 August 2016); doi: 10.1117/12.2240623
Show Author Affiliations
V. C. Pretheesh Kumar, Indian Institute of Technology Madras (India)
A. R. Ganesan, Indian Institute of Technology Madras (India)
C. Joenathan, Rose Hulman Institute of Technology (United States)
U. Somasundaram, Indian Institute of Technology Madras (India)

Published in SPIE Proceedings Vol. 9960:
Interferometry XVIII
Katherine Creath; Jan Burke; Armando Albertazzi Gonçalves Jr., Editor(s)

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