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Proceedings Paper

Development of metrology for one-meter-long mirrors (Conference Presentation)
Author(s): Shinya Aono; Hiroki Nakamori; Akihiko Ueda; Takashi Tsumra; Hiromi Okada

Paper Abstract

We fabricate ultra-precision mirrors, Osaka Mirror, for synchrotron facilities. In order to fabricate them, it is very important to measure mirror surface precisely. In respect of the importance, we use two kinds of metrology, RADSI and MSI, developed by Osaka University. We have delivered more than 300 mirrors to synchrotron facilities all over the world since 2006 and our mirrors have produced excellent results to many researchers. As the demand on one meter long mirrors has increased lately, we developed RADSI and MSI systems which are capable in precise measurement of such long mirrors.

Paper Details

Date Published: 2 November 2016
PDF: 1 pages
Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996209 (2 November 2016); doi: 10.1117/12.2239396
Show Author Affiliations
Shinya Aono, JTEC Corp. (Japan)
Hiroki Nakamori, JTEC Corp. (Japan)
Akihiko Ueda, JTEC Corp. (Japan)
Takashi Tsumra, JTEC Corp. (Japan)
Hiromi Okada, JTEC Corp. (Japan)

Published in SPIE Proceedings Vol. 9962:
Advances in Metrology for X-Ray and EUV Optics VI
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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