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Proceedings Paper

High resolution measurement of water levels in optical components
Author(s): Fabian N. Murrieta-Rico; Vitalii Petranovskii; Oleg Sergiyenko; Daniel Hernandez-Balbuena; Oscar Raymond-Herrera
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Paper Abstract

Systems for optical analysis use vacuum chambers, where low pressures are reached. Remaining water molecules are the prevalent contaminant in high vacuum chambers. For this reason measurement of water levels is an important task that allows correct equipment operation. In this work, a different approach is presented for detecting and quantifying the water molecules inside a the vacuum chamber used in optical systems. A zeolite coated quartz crystal microbalance is used for detecting the water molecules, and the change in the resonance frequency is measured using a novel technique known as the principle of rational approximations. Theoretical results show how nanograms of adsorbed molecules are measured, and the number of molecules are quantified.

Paper Details

Date Published: 15 September 2016
PDF: 6 pages
Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99271K (15 September 2016); doi: 10.1117/12.2238849
Show Author Affiliations
Fabian N. Murrieta-Rico, Ctr. de Investigación Científica y de Educación Superior de Ensenada B.C. (Mexico)
Vitalii Petranovskii, Univ. Nacional Autónoma de México (Mexico)
Oleg Sergiyenko, Univ. Autónoma de Baja California (Mexico)
Daniel Hernandez-Balbuena, Univ. Autónoma de Baja California (Mexico)
Oscar Raymond-Herrera, Univ. Nacional Autónoma de México (Mexico)

Published in SPIE Proceedings Vol. 9927:
Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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