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Proceedings Paper

Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer
Author(s): Toshiki Kumagai; Kenichi Hibino; Yasunari Nagaike
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Paper Abstract

A method to reduce the phase measurement errors generated from internal-reflection light noise in a Fizeau interferometer is proposed. In addition to an ordinary phase-shift by a mechanical translation of the reference surface, the test surface is also mechanically translated between each phase measurement to further modulate the signal phase. For spherical tests, a mechanical phase-shift generally generates a spatial non-uniformity in the phase increment across the observing aperture. It is shown that a minimum of three positional measurements is necessary to cancel out the systematic error caused by this non-uniformity. Linear combinations of the three measured phases can also cancel the additional primary spherical aberrations that occur when the test surface is out of the null position of the confocal configuration.

Paper Details

Date Published: 28 August 2016
PDF: 7 pages
Proc. SPIE 9960, Interferometry XVIII, 99600C (28 August 2016); doi: 10.1117/12.2237494
Show Author Affiliations
Toshiki Kumagai, Olympus Corp. (Japan)
Kenichi Hibino, National Institute of Advanced Industrial Science and Technology (Japan)
Yasunari Nagaike, Olympus Corp. (Japan)

Published in SPIE Proceedings Vol. 9960:
Interferometry XVIII
Katherine Creath; Jan Burke; Armando Albertazzi Gonçalves Jr., Editor(s)

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