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Proceedings Paper

Effect of ion-assisted deposition on optical properties of thin films
Author(s): Xuefei Tang; Zhengxiu Fan
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Paper Abstract

Effects of ion assisted deposition on the propertes of Ti02, Zr02 and 5102 optical coatings were investigated. Substrates were bombarded with different ions--- oxygen ions , argon ions , and the mixture ions of oxygen-argon during deposition. The refractive indices, optical absorptions and laser-induced damage thresholds (LIDT) measurments of these films are reported.

Paper Details

Date Published: 1 December 1990
PDF: 8 pages
Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22374
Show Author Affiliations
Xuefei Tang, Shanghai Institute of Optics and Fine Mechanics (United States)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 1323:
Optical Thin Films III: New Developments
Richard Ian Seddon, Editor(s)

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