
Proceedings Paper
The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavityFormat | Member Price | Non-Member Price |
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Paper Abstract
There is a temperature drift of an accelerometer attributed to the temperature variation, which would adversely influence
the output performance. In this paper, a quantitative analysis of the temperature effect and the temperature compensation
of a MOEMS accelerometer, which is composed of a grating interferometric cavity and a micromachined sensing chip,
are proposed. A finite-element-method (FEM) approach is applied in this work to simulate the deformation of the
sensing chip of the MOEMS accelerometer at different temperature from -20°C to 70°C. The deformation results in the
variation of the distance between the grating and the sensing chip of the MOEMS accelerometer, modulating the output
intensities finally. A static temperature model is set up to describe the temperature characteristics of the accelerometer
through the simulation results and the temperature compensation is put forward based on the temperature model, which
can improve the output performance of the accelerometer. This model is permitted to estimate the temperature effect of
this type accelerometer, which contains a micromachined sensing chip. Comparison of the output intensities with and
without temperature compensation indicates that the temperature compensation can improve the stability of the output
intensities of the MOEMS accelerometer based on a grating interferometric cavity.
Paper Details
Date Published: 28 August 2016
PDF: 7 pages
Proc. SPIE 9960, Interferometry XVIII, 99600X (28 August 2016); doi: 10.1117/12.2236584
Published in SPIE Proceedings Vol. 9960:
Interferometry XVIII
Katherine Creath; Jan Burke; Armando Albertazzi Gonçalves Jr., Editor(s)
PDF: 7 pages
Proc. SPIE 9960, Interferometry XVIII, 99600X (28 August 2016); doi: 10.1117/12.2236584
Show Author Affiliations
Shuqi Lou, Zhejiang Univ. (China)
Xufen Jiao, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)
Xufen Jiao, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)
Published in SPIE Proceedings Vol. 9960:
Interferometry XVIII
Katherine Creath; Jan Burke; Armando Albertazzi Gonçalves Jr., Editor(s)
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