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Proceedings Paper

Process design kit and circuits at a 2 µm technology node for flexible wearable electronics applications (Conference Presentation)
Author(s): Miguel Torres-Miranda; Andreas Petritz; Herbert Gold; Barbara Stadlober

Paper Abstract

In this work we present our most advanced technology node of organic thin film transistors (OTFTs) manufactured with a channel length as short as 2 μm by contact photolithography and a self-alignment process directly on a plastic substrate. Our process design kit (PDK) is described with P-type transistors, capacitors and 3 metal layers for connections of complex circuits. The OTFTs are composed of a double dielectric layer with a photopatternable ultra thin polymer (PNDPE) and alumina, with a thickness on the order of 100 nm. The organic semiconductor is either Pentacene or DNTT, which have a stable average mobility up to 0.1 cm2/Vs. Finally, a polymer (e.g.: Parylene-C) is used as a passivation layer. We describe also our design rules for the placement of standard circuit cells. A “plastic wafer” is fabricated containing 49 dies. Each die of 1 cm2 has between 25 to 50 devices, proving larger scale integration in such a small space, unique in organic technologies. Finally, we present the design (by simulations using a Spice model for OTFTs) and the test of analog and digital basic circuits: amplifiers with DC gains of about 20 dB, comparators, inverters and logic gates working in the frequency range of 1-10 kHz. These standard circuit cells could be used for signal conditioning and integrated as active matrices for flexible sensors from 3rd party institutions, thus opening our fab to new ideas and sophisticated pre-industrial low cost applications for the emerging fields of biomedical devices and wearable electronics for virtual/augmented reality.

Paper Details

Date Published: 7 November 2016
PDF: 1 pages
Proc. SPIE 9945, Printed Memory and Circuits II, 99450D (7 November 2016); doi: 10.1117/12.2236503
Show Author Affiliations
Miguel Torres-Miranda, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Andreas Petritz, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Herbert Gold, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Barbara Stadlober, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)

Published in SPIE Proceedings Vol. 9945:
Printed Memory and Circuits II
Emil J. W. List-Kratochvil, Editor(s)

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