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Proceedings Paper

Automatic inspection for surface imperfections: requirements, potentials and limits
Author(s): Ralph Neubecker; Jenny E. Hon
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Paper Abstract

The inspection of optical elements for surface imperfections is mostly based on subjective evaluation by human operators. Automatic inspection systems (AIS) may introduce advantages in term of reliability, reproducibility and cycle time. The potential and limits of a camera-based, high-resolution AIS for scratches and digs are discussed. One important aspect is the illumination concept (brightfield or darkfield), regarded in relation to the scattering properties of an imperfection. Another aspect is the achievable spatial resolution of such a system. Different resolution limiting factors are considered, leading to criteria for the choice of digital sensors und imaging optics. Options to overcome a limited depth-of- field are also outlined. Next to technical aspects, the role of related standard specifications and system validations are addressed.

Paper Details

Date Published: 30 June 2016
PDF: 13 pages
Proc. SPIE 10009, Third European Seminar on Precision Optics Manufacturing, 1000907 (30 June 2016); doi: 10.1117/12.2235863
Show Author Affiliations
Ralph Neubecker, Darmstadt Univ. of Applied Sciences (Germany)
Jenny E. Hon, Darmstadt Univ. of Applied Sciences (Germany)

Published in SPIE Proceedings Vol. 10009:
Third European Seminar on Precision Optics Manufacturing
Rolf Rascher; Oliver Fähnle; Christine Wünsche; Christian Schopf, Editor(s)

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