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Proceedings Paper

A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range
Author(s): Pilar Gonzalez; Klaas Tack; Bert Geelen; Bart Masschelein; Wouter Charle; Bart Vereecke; Andy Lambrechts
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Paper Abstract

Imec has developed a process for the monolithic integration of optical filters on top of CMOS image sensors, leading to compact, cost-efficient and faster hyperspectral cameras. Different prototype sensors are available, most notably a 600- 1000 nm line-scan imager, and two mosaic sensors: a 4x4 VIS (470-620 nm range) and a 5x5 VNIR (600-1000 nm). In response to the users’ demand for a single sensor able to cover both the VIS and NIR ranges, further developments have been made to enable more demanding applications. As a result, this paper presents the latest addition to imec’s family of monolithically-integrated hyperspectral sensors: a line scan sensor covering the range 470-900 nm. This new prototype sensor can acquire hyperspectral image cubes of 2048 pixels over 192 bands (128 bands for the 600- 900 nm range, and 64 bands for the 470-620 nm range) at 340 cubes per second for normal machine vision illumination levels.

Paper Details

Date Published: 12 May 2016
PDF: 9 pages
Proc. SPIE 9855, Next-Generation Spectroscopic Technologies IX, 98550N (12 May 2016); doi: 10.1117/12.2230726
Show Author Affiliations
Pilar Gonzalez, Imec (Belgium)
Klaas Tack, Imec (Belgium)
Bert Geelen, Imec (Belgium)
Bart Masschelein, Imec (Belgium)
Wouter Charle, Imec (Belgium)
Bart Vereecke, Imec (Belgium)
Andy Lambrechts, Imec (Belgium)

Published in SPIE Proceedings Vol. 9855:
Next-Generation Spectroscopic Technologies IX
Mark A. Druy; Richard A. Crocombe, Editor(s)

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