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Proceedings Paper

Generalized phase-shifting interferometry
Author(s): Guanming Lai; Toyohiko Yatagai
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Paper Abstract

This paper describes a generalized phase shifting interferometiy where the reference phase instead of being set to predetermined values is directly evaluated at each time the interference fringe data are read. The evaluation of the phase shifted is achieved by introducing the FF1'' method for analyzing additional straight fringes on the interfering plane. The repeatability in the measurements of an optical surface is V500 when the generalized algorithm with 8 data acquisitions is used. 1.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22288
Show Author Affiliations
Guanming Lai, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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