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Proceedings Paper

Development and analysis of new type microresonator with electro-optic feedback
Author(s): Giedrius Janusas; Arvydas Palevicius; Elingas Cekas; Alfredas Brunius; Jokubas Bauce
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Paper Abstract

Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.

Paper Details

Date Published: 27 April 2016
PDF: 8 pages
Proc. SPIE 9889, Optical Modelling and Design IV, 98891N (27 April 2016); doi: 10.1117/12.2228789
Show Author Affiliations
Giedrius Janusas, Kaunas Univ. of Technology (Lithuania)
Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Elingas Cekas, Kaunas Univ. of Technology (Lithuania)
Alfredas Brunius, Kaunas Univ. of Technology (Lithuania)
Jokubas Bauce, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 9889:
Optical Modelling and Design IV
Frank Wyrowski; John T. Sheridan; Youri Meuret, Editor(s)

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