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Proceedings Paper

Microanalysis to nanoanalysis: analytical techniques for chemical characterization of micrometer- to nanometer-scale structures
Author(s): Dale E. Newbury
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Paper Abstract

Natural and synthetic microstructures with micrometer- to nanometer-scale features present a significant challenge to chemical analysis techniques. As the dimensions of features are reduced, the number of atoms and molecules to be analyzed becomes so small that useful analytical signals can only be obtained through optimization of the entire measurement process: e.g., the use of high brightness radiation sources, high efficiency spectrometers, and long counting times. Techniques based upon beams of electrons, photons, ions, and neutrons and generally incorporating some form of microscopy are available. The suite of characterization techniques can provide a wide variety of information on elemental and molecular composition, morphology, and crystal structure on a scale ranging from micrometers to nanometers.

Paper Details

Date Published: 26 September 1995
PDF: 12 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222653
Show Author Affiliations
Dale E. Newbury, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)

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