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Proceedings Paper

Generic technology, measurement, and standards issues in micromachining and microfabrication
Author(s): Dennis A. Swyt
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Paper Abstract

Microelectromechanical systems (MEMS) are integrally-fabricated hybrids of micromechanical and microelectronic elements which serve together as sensors, actuators or both. While there are proprietary issues in MEMS products currently in or near commercial production, there are also a number of generic technology, measurement and standards issues which may be addressed.

Paper Details

Date Published: 26 September 1995
PDF: 6 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222644
Show Author Affiliations
Dennis A. Swyt, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)

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