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Proceedings Paper

Rapid fabrication of molds by mechanical micromilling: process development
Author(s): Craig R. Friedrich; Bharath Kikkeri
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Paper Abstract

At the macroscale, the milling process is very versatile and capable of creating 3D features and structures. Adaptation of this process at the microscale could lead to the rapid and direct fabrication of micromolds and masks to aid in the development of microcomponents. This task has been undertaken and results of the process indicate it can become an increasingly useful method. The micromilling process is currently characterized by milling tools with a diameter as small as 22 micrometers. The micromilling process can create trench-like features with vertical sidewalls and good smoothness. External corners are sharp and stepped features can be machined simply by programming those shapes. The process is direct and therefore dimensional errors do not accumulate as can occur with serial fabrication processes.

Paper Details

Date Published: 26 September 1995
PDF: 11 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222643
Show Author Affiliations
Craig R. Friedrich, Louisiana Tech Univ. (United States)
Bharath Kikkeri, Louisiana Tech Univ. (United States)

Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)

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