Proceedings Paper
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Paper Abstract
The possibility of implementing Feynman's proposal for achieving ultraminiaturization by an iterative process of 3D machines making even-smaller 3D machines is considered in the nature of a `thought experiment.' A large array of Stewart platform machines is proposed as the `machine/factory' which possibly could have the capability to make ever-smaller versions of itself.
Paper Details
Date Published: 26 September 1995
PDF: 7 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222635
Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)
PDF: 7 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222635
Show Author Affiliations
E. Clayton Teague, National Institute of Standards and Technology (United States)
Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)
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