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Proceedings Paper

Triangulation-based 3D surveying borescope
Author(s): S. Pulwer; P. Steglich; C. Villringer; J. Bauer; M. Burger; M. Franz; K. Grieshober; F. Wirth; J. Blondeau; J. Rautenberg; S. Mouti; S. Schrader
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Paper Abstract

In this work, a measurement concept based on triangulation was developed for borescopic 3D-surveying of surface defects. The integration of such measurement system into a borescope environment requires excellent space utilization. The triangulation angle, the projected pattern, the numerical apertures of the optical system, and the viewing angle were calculated using partial coherence imaging and geometric optical raytracing methods. Additionally, optical aberrations and defocus were considered by the integration of Zernike polynomial coefficients. The measurement system is able to measure objects with a size of 50 μm in all dimensions with an accuracy of ± 5 μm. To manage the issue of a low depth of field while using an optical high resolution system, a wavelength dependent aperture was integrated. Thereby, we are able to control depth of field and resolution of the optical system and can use the borescope in measurement mode with high resolution and low depth of field or in inspection mode with low resolution and higher depth of field. First measurements of a demonstrator system are in good agreement with our simulations.

Paper Details

Date Published: 26 April 2016
PDF: 6 pages
Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989009 (26 April 2016); doi: 10.1117/12.2225203
Show Author Affiliations
S. Pulwer, Technische Hochschule Wildau (Germany)
Univ. Roma Tor Vergata (Italy)
P. Steglich, Technische Hochschule Wildau (Germany)
Univ. Roma Tor Vergata (Italy)
C. Villringer, Technische Hochschule Wildau (Germany)
Univ. Roma Tor Vergata (Italy)
J. Bauer, Technische Hochschule Wildau (Germany)
M. Burger, Technische Hochschule Wildau (Germany)
M. Franz, Schölly Fiberoptic GmbH (Germany)
K. Grieshober, Schölly Fiberoptic GmbH (Germany)
F. Wirth, Schölly Mirco-Optic GmbH (Germany)
J. Blondeau, 5micron GmbH (Germany)
J. Rautenberg, Rolls-Royce Deutschland Ltd. & Co. KG (Germany)
S. Mouti, Rolls-Royce Deutschland Ltd. & Co. KG (Germany)
S. Schrader, Technische Hochschule Wildau (Germany)

Published in SPIE Proceedings Vol. 9890:
Optical Micro- and Nanometrology VI
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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