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Proceedings Paper

Design and analysis of frequency-selective surface enabled microbolometers
Author(s): Tao Liu; Chuang Qu; Mahmoud Almasri; Edward Kinzel
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Paper Abstract

Frequency Selective Surfaces (FSS) are periodic array of sub-wavelength antenna elements. They allow the absorptance and reflectance of a surface to be engineered with respect to wavelength, polarization and angle-of-incidence. This paper applies this technique to microbolometers for uncooled infrared sensing applications. Both narrowband and broadband near perfect absorbing surfaces are synthesized and applied engineer the response of microbolometers. The paper focuses on simple FSS geometries (hexagonal close packed disk arrays) that can be fabricated using conventional lithographic tools for use at thermal infrared wavelengths (feature sizes > 1 μm). The affects of geometry and material selection for this geometry is described in detail. In the microbolometer application, the FSS controls the absorption rather than a conventional Fabry-Perot cavity and this permits an improved thermal design. A coupled full wave electromagnetic/transient thermal model of the entire microbolometer is presented and analyzed using the finite element method. The absence of the cavity also permits more flexibility in the design of the support arms/contacts. This combined modeling permits prediction of the overall device sensitivity, time-constant and the specific detectivity.

Paper Details

Date Published: 20 May 2016
PDF: 8 pages
Proc. SPIE 9819, Infrared Technology and Applications XLII, 98191V (20 May 2016); doi: 10.1117/12.2224271
Show Author Affiliations
Tao Liu, Missouri Univ. of Science and Technology (United States)
Chuang Qu, Missouri Univ. of Science and Technology (United States)
Mahmoud Almasri, Univ. of Missouri (United States)
Edward Kinzel, Missouri Univ. of Science and Technology (United States)

Published in SPIE Proceedings Vol. 9819:
Infrared Technology and Applications XLII
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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