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Proceedings Paper

Topological study of nanomaterials using surface-enhanced ellipsometric contrast microscopy (SEEC)
Author(s): Sylvain Muckenhirn
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Paper Abstract

Innovations in nanotechnology are empowering scientists to deepen their understanding of physical, chemical and biological mechanisms. Powerful and precise characterization systems are essential to meet researchers’ requirements. SEEC (Surface Enhanced Ellipsometric Contrast) microscopy is an innovative advanced optical technique based on ellipsometric and interference fringes of Fizeau principles. This technique offers live and label-free topographic imaging of organic, inorganic and biological samples with high Z resolution (down to 0.1nm thickness), and enhanced X-Y detection limit (down to 1.5nm width). This technique has been successfully applied to the study of nanometric films and structures, biological layers, and nano-objects. We applied SEEC technology to different applications explored below.

Paper Details

Date Published: 24 March 2016
PDF: 8 pages
Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97780R (24 March 2016); doi: 10.1117/12.2220592
Show Author Affiliations
Sylvain Muckenhirn, Iris Versicolor Corp. (United States)

Published in SPIE Proceedings Vol. 9778:
Metrology, Inspection, and Process Control for Microlithography XXX
Martha I. Sanchez, Editor(s)

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