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Proceedings Paper

Improved cost-effectiveness of the block co-polymer anneal process for DSA
Author(s): Hari Pathangi; Maarten Stokhof; Werner Knaepen; Varun Vaid; Arindam Mallik; Boon Teik Chan; Nadia Vandenbroeck; Jan Willem Maes; Roel Gronheid
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Paper Abstract

This manuscript first presents a cost model to compare the cost of ownership of DSA and SAQP for a typical front end of line (FEoL) line patterning exercise. Then, we proceed to a feasibility study of using a vertical furnace to batch anneal the block co-polymer for DSA applications. We show that the defect performance of such a batch anneal process is comparable to the process of record anneal methods. This helps in increasing the cost benefit for DSA compared to the conventional multiple patterning approaches.

Paper Details

Date Published: 1 April 2016
PDF: 5 pages
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771Z (1 April 2016); doi: 10.1117/12.2220043
Show Author Affiliations
Hari Pathangi, IMEC (Belgium)
Maarten Stokhof, ASM International N.V. (Belgium)
Werner Knaepen, ASM International N.V. (Belgium)
Varun Vaid, IMEC (Belgium)

Arindam Mallik, IMEC (Belgium)
Boon Teik Chan, IMEC (Belgium)
Nadia Vandenbroeck, IMEC (Belgium)
Jan Willem Maes, ASM International N.V. (Belgium)
Roel Gronheid, IMEC (Belgium)

Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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