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Proceedings Paper

Spatial conversion of excimer laser beam
Author(s): Alexander Grishkanich; Alexander Zhevlakov; Sergey Kascheev; Veli Kujanpaa; Timo Savinainen
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Paper Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 х 20 mm and equal divergence of 5 х 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

Paper Details

Date Published: 15 March 2016
PDF: 6 pages
Proc. SPIE 9780, Optical Microlithography XXIX, 97801L (15 March 2016); doi: 10.1117/12.2219934
Show Author Affiliations
Alexander Grishkanich, ITMO Univ. (Russian Federation)
Alexander Zhevlakov, ITMO Univ. (Russian Federation)
Sergey Kascheev, ITMO Univ. (Russian Federation)
Veli Kujanpaa, Lappeenrannan Univ. of Technology (Finland)
Timo Savinainen, VTT Industrial Systems (Finland)

Published in SPIE Proceedings Vol. 9780:
Optical Microlithography XXIX
Andreas Erdmann; Jongwook Kye, Editor(s)

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