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Proceedings Paper

Nonlinear modeling of MEMS piezoelectric energy harvesters
Author(s): Y. C. Wang; T. W. Huang; Y. C. Shu; S. C. Lin; W. J. Wu
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Paper Abstract

This article presents the modeling of nonlinear response of micro piezoelectric energy harvesters under amplified base excitation. The micro transducer is a composite cantilever beam made of the PZT thick film deposited on the stainless-steel substrate. The model is developed based on the Euler-Bernoulli beam theory considering geometric and inertia nonlinearities, and the reduced formulation is derived based on the Hamiltonian variational principle. The harmonic balance method is used to simulate the nonlinear frequency response under various magnitudes of excitation and electric loads. The hardening type of nonlinearity is predicted and is found to be in good agreement with experiment. However, the softening response is also observed in different samples fabricated under different conditions. Such disagreement is under investigation.

Paper Details

Date Published: 15 April 2016
PDF: 7 pages
Proc. SPIE 9799, Active and Passive Smart Structures and Integrated Systems 2016, 97992D (15 April 2016); doi: 10.1117/12.2218593
Show Author Affiliations
Y. C. Wang, National Taiwan Univ. (Taiwan)
T. W. Huang, National Taiwan Univ. (Taiwan)
Y. C. Shu, National Taiwan Univ. (Taiwan)
S. C. Lin, National Taiwan Univ. (Taiwan)
W. J. Wu, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9799:
Active and Passive Smart Structures and Integrated Systems 2016
Gyuhae Park, Editor(s)

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