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Proceedings Paper

Tomographic scanning microscope for 1 to 4-KeV xrays
Author(s): Ian McNulty; Yipeng Feng; Waleed S. Haddad; James E. Trebes
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Paper Abstract

X-ray microtomography enables three-dimensional imaging at sub-micron resolution with elemental and chemical state contrast. The 1 - 4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, we are constructing a tomographic scanning x-ray microscope for 1 - 4 KeV x rays on a spherical grating monochromator beamline at the advanced photon source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.

Paper Details

Date Published: 25 September 1995
PDF: 4 pages
Proc. SPIE 2516, X-Ray Microbeam Technology and Applications, (25 September 1995); doi: 10.1117/12.221676
Show Author Affiliations
Ian McNulty, Argonne National Lab. (United States)
Yipeng Feng, Argonne National Lab. (United States)
Waleed S. Haddad, Lawrence Livermore National Lab. (United States)
James E. Trebes, Lawrence Livermore National Lab. (United States)

Published in SPIE Proceedings Vol. 2516:
X-Ray Microbeam Technology and Applications
Wenbing Yun, Editor(s)

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