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Proceedings Paper

Improvement of reconstructed phase distribution of fast moving phase object in digital holographic microscope
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Paper Abstract

For defect detection or undesired object in commercial products, it is required to develop a fast measurement system that can obtain three-dimensional distribution of surface of the opaque medium such as metal or inside of the transparent medium. For this purpose, we fabricated a digital holographic microscope using a fast image sensor when the phase object is put on a fast movable stage. In the fabricated system, an image sensor operated at maximum frame rate of 2000 fps and a movable stage operated at maximum speed of 300 mm/s are introduced. Under the continuous wave illumination, motion-blurred phase object is reconstructed. By using numerical processing such as deconvolution filter, the reconstructed phase distribution is much improved. Numerical results are presented.

Paper Details

Date Published: 8 June 2016
PDF: 6 pages
Proc. SPIE 9718, Quantitative Phase Imaging II, 97181R (8 June 2016); doi: 10.1117/12.2216745
Show Author Affiliations
Peng Xia, Kobe Univ. (Japan)
Naoya Nagahama, Kobe Univ. (Japan)
Xiangyu Quan, Kobe Univ. (Japan)
Kouichi Nitta, Kobe Univ. (Japan)
Osamu Matoba, Kobe Univ. (Japan)
Yasuhiro Awatsuji, Kyoto Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 9718:
Quantitative Phase Imaging II
Gabriel Popescu; YongKeun Park, Editor(s)

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