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Proceedings Paper

Ultrahigh-resolution soft x-ray tomography
Author(s): Waleed S. Haddad; James E. Trebes; Dennis M. Goodman; Heung-Rae Lee; Ian McNulty; Erik H. Anderson; Andrei O. Zalensky
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Paper Abstract

Ultra high resolution three-dimensional images of a microscopic test object were made with soft x rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometer. A series of nine 2-D images of the object were recorded at angles between -5 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of approximately 1000 angstrom was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstrom, however some features were clearly reconstructed with a depth resolution of approximately 1000 angstrom. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution, bringing it down to approximately 1200 angstrom overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.

Paper Details

Date Published: 25 September 1995
PDF: 6 pages
Proc. SPIE 2516, X-Ray Microbeam Technology and Applications, (25 September 1995); doi: 10.1117/12.221664
Show Author Affiliations
Waleed S. Haddad, Lawrence Livermore National Lab. (United States)
James E. Trebes, Lawrence Livermore National Lab. (United States)
Dennis M. Goodman, Lawrence Livermore National Lab. (United States)
Heung-Rae Lee, Lawrence Livermore National Lab. (United States)
Ian McNulty, Argonne National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Andrei O. Zalensky, Univ. of California/Davis (United States)

Published in SPIE Proceedings Vol. 2516:
X-Ray Microbeam Technology and Applications
Wenbing Yun, Editor(s)

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