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Proceedings Paper

Rigorous theoretical investigation of distortion in ion-projection noncathode systems
Author(s): Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat
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Paper Abstract

Calculation technique has been worked out and distortion has been studied in ion optical systems with reduction wide-field image intended to Ion Projection Lithography. It is offered the refined definitions for distortion, fine structure of distortion picture, paraxial system, optimal regime of collimator tuning, which allows us to optimize conditions influencing on distortion value. The criterion of optimization is in maximum work field limited by given value of distortion. Three alternative calculation methods are employed in which third-order and fifth-order distortion is obtained. One is a new approach to the system having collimator and projector. Calculation of electric field is carried out by means of the method of integral equations with calculating derivatives of field functions on axis up to the fourth order which is necessary for fifth-order distortion calculation. Cases of distortion related to perturbation of axial symmetry and their correction and resting members are considered. Rigorous solution of differential equations and analysis of obtained results gives us picture of fine distortion structure with simultaneous presents intrinsic barrel-type and extrinsic pincushion-like areas separated by contour of null-value distortion which due to a deformation in result of presents the fourth-order distortion. Perturbation distortion has been increased in intrinsic area in spite of correction.

Paper Details

Date Published: 25 September 1995
PDF: 12 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221619
Show Author Affiliations
Stanislav N. Jatchmenev, Vekshinskiy Research Institute of Vacuum Techniques (Russia)
Anatoliy I. Shitakov, Moscow State Institute of Electronics and Mathematics (Russia)
Igor P. Vykhat, Moscow State Institute of Electronics and Mathematics (Russia)

Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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