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Proceedings Paper

New design for a field emission electron gun immersed in a magnetic lens field
Author(s): Kenichi Saito; Hirofumi Morita; Nobuo Shimazu; Yasumichi Uno
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Paper Abstract

This paper describes a new design for a field emission electron gun immersed in a magnetic- lens field. Its low aberration yields both a high brightness and a high emittance. A single-pole- like magnetic lens made a water-cooled pipe coil produces a magnetic flux density of 0.28 T at the emitter tip. The spherical aberration of the gun, as calculated by an electron ray tracing program, is only 1/3 that of a conventional gun with a magnetic lens. A prototype of the gun was constructed using a zirconium-oxide/tungsten thermal-field emitter. The measured crossover diameters agree with those calculated by the ray tracing program, confirming that the aberration is very low.

Paper Details

Date Published: 25 September 1995
PDF: 9 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221572
Show Author Affiliations
Kenichi Saito, NTT LSI Labs. (Japan)
Hirofumi Morita, NTT LSI Labs. (Japan)
Nobuo Shimazu, NTT LSI Labs. (Japan)
Yasumichi Uno, NTT LSI Labs. (Japan)

Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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