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Proceedings Paper

Molecular beam study of N2 scattering from Si(100)
Author(s): Jennifer L. W. Siders; Greg O. Sitz
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Paper Abstract

The scattering of N2 from Si(100) was studied using state-selective detection and molecular beam techniques. Both trapping-desorption and direct inelastic scattering channels were observed. For an incident N2 energy of 0.08 eV, the trapping-desorption probability was found to be essentially unity for surface temperatures between 93 K and 573 K. The velocity and rotational state distributions of the desorbing molecules show that the nitrogen is fully accommodate with the surface. For an incident energy of 0.29 eV, a direct inelastic channel as well as the trapping-desorption channel was present. The rotational state distributions of both channels were studied as a function of surface temperature and incident energy.

Paper Details

Date Published: 25 September 1995
PDF: 12 pages
Proc. SPIE 2547, Laser Techniques for Surface Science II, (25 September 1995); doi: 10.1117/12.221476
Show Author Affiliations
Jennifer L. W. Siders, Univ. of Texas/Austin (United States)
Greg O. Sitz, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 2547:
Laser Techniques for Surface Science II
Janice M. Hicks; Wilson Ho; Hai-Lung Dai, Editor(s)

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