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Proceedings Paper

MOEMS FPI sensors for NIR-MIR microspectrometer applications
Author(s): A. Akujärvi; B. Guo; R. Mannila; A. Rissanen
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Paper Abstract

This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 – 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 – 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

Paper Details

Date Published: 15 March 2016
PDF: 8 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600M (15 March 2016); doi: 10.1117/12.2214710
Show Author Affiliations
A. Akujärvi, VTT Technical Research Ctr. of Finland Ltd. (Finland)
B. Guo, VTT Technical Research Ctr. of Finland Ltd. (Finland)
R. Mannila, VTT Technical Research Ctr. of Finland Ltd. (Finland)
A. Rissanen, VTT Technical Research Ctr. of Finland Ltd. (Finland)

Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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