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Proceedings Paper

Process design for manufacturability of GaAs MESFET integrated circuit using statistical experimental design techniques
Author(s): Jian S. Wang; C. C. Teng; J. R. Middleton; Peter J. Apostolakis; Milton Feng
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Paper Abstract

A manufacturable, directly ion implanted 0.6 micrometers GaAs metal- semiconductor field-effect transistors (MESFET) and metal-semiconductor- metal (MSM) based opto-electronic integrated circuit (OEIC) process has been developed and optimized for low cost optical data link applications. Key steps in the OEIC process have been identified and statistically quantifiable process modules have been obtained to optimize the circuit performance and achieve high process yield. The statistically significant transfer characteristics of each process module was obtained through design of experiment (DOE) and response surface modeling (RSM), by utilizing both experimental data and data from experimentally calibrated process simulators. This paper discusses the PECVD Si2N4 process module optimization and the backgating effects in GaAs ICs.

Paper Details

Date Published: 22 September 1995
PDF: 10 pages
Proc. SPIE 2635, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis, (22 September 1995); doi: 10.1117/12.221451
Show Author Affiliations
Jian S. Wang, Univ. of Illinois/Urbana-Champaign (United States)
C. C. Teng, Univ. of Illinois/Urbana-Champaign (United States)
J. R. Middleton, Univ. of Illinois/Urbana-Champaign (United States)
Peter J. Apostolakis, Univ. of Illinois/Urbana-Champaign (United States)
Milton Feng, Univ. of Illinois/Urbana-Champaign (United States)

Published in SPIE Proceedings Vol. 2635:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis
Gopal Rao; Massimo Piccoli, Editor(s)

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