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Proceedings Paper

Radiation damages in semiconductors tested by exoelectron spectroscopy
Author(s): Yuri Dekhtyar
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Paper Abstract

A radiation treatment is used often to manufacture of semiconductor chips. Their surface layers excited by this way have the important role in reliability of produced devices. Thus, a response of the surface on the radiation affection is necessary to test. The problem may be solved using a method providing information about point defects inserted due to the considered treatment. Exoelectron spectroscopy (ES) has been developed to hit this target, taking into account an evaluation of the single imperfections concentration and their relaxation processes.

Paper Details

Date Published: 22 September 1995
PDF: 8 pages
Proc. SPIE 2635, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis, (22 September 1995); doi: 10.1117/12.221450
Show Author Affiliations
Yuri Dekhtyar, Riga Technical Univ. (Latvia)


Published in SPIE Proceedings Vol. 2635:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis
Gopal Rao; Massimo Piccoli, Editor(s)

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