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Proceedings Paper

Subwavelength grating waveguide-integrated athermal Mach-Zehnder interferometer with enhanced fabrication error tolerance and wide stable spectral range
Author(s): Peng Xing; Jaime Viegas
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Paper Abstract

We propose an athermal Mach-Zehnder interferometer (MZI) with a subwavelength grating waveguide implemented in one of the arms to increase its fabrication error tolerance. The design is demonstrated with a CMOS compatible fabrication. In this work we will discuss the design principles of the subwavelength grating, loss mechanism, fabrication procedure and experimental results obtained. The fabricated devices have a temperature sensitivity of less than 10 pm/K over a spectral range from 1.5μm to 1.64μm. Also, the fabricated devices have a stable performance within the aforementioned specifications even with fabrication linewidth variations from -20 nm to 40 nm.

Paper Details

Date Published: 18 March 2016
PDF: 7 pages
Proc. SPIE 9752, Silicon Photonics XI, 97520U (18 March 2016); doi: 10.1117/12.2214101
Show Author Affiliations
Peng Xing, Masdar Institute of Science & Technology (United Arab Emirates)
Jaime Viegas, Masdar Institute of Science & Technology (United Arab Emirates)

Published in SPIE Proceedings Vol. 9752:
Silicon Photonics XI
Graham T. Reed; Andrew P. Knights, Editor(s)

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