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Proceedings Paper

High-speed and high-resolution heterodyne interferometer
Author(s): Shuko Yokoyama; I. Nishihara; A. Okamoto; Tsutomu Araki; Norihito Suzuki
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Paper Abstract

In conventional heterodyne interferometer it Is necessary to provide a high-beat frequency laser when measurement for a high-speed target Is required1 . But use of the high-beat frequency laser makes the " nanometerdivisions" difficult. We have developed a novel interferometer system that has a sufficient response to high-speed movement of the target without Increase of the laser beat frequency. In this work a two frequency laser light passes through the same optical path of the interferometer so that two conjugate beat signals are obtained. By processing the multiple beat signals with a newly developed signal processor the above methodological contradiction is solved. l. OPTICS FOR LINEAR DISTANCE MEASUREMENT Optical system of the interferometer Is shown In Flg. l in which two frequency lights Fl and F2 (freq. f and f2) of orthogonally linear-polarized components of a two mode laser are used. A reference beat signal R (freq. r ) is generated from Fl and F2. Fl and F2 are passed through exactly the same path of the interferometer. A half power of Fl and F2 Is reflected and the rest Is transmitted In the beam splitter ( BS ). Polarization direction of the reflected beam is rotated for ir/2 after passing the X/4 plate twice. The transmitted beam Is reflected by a moving mirror (MM) mounted on the moving target so that frequency of the reflected beam Is shifted by Doppler

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22135
Show Author Affiliations
Shuko Yokoyama, IDEC Izumi Co. (Japan)
I. Nishihara, IDEC Izumi Co. (Japan)
A. Okamoto, IDEC Izumi Co. (Japan)
Tsutomu Araki, Univ. of Tokushima (Japan)
Norihito Suzuki, Osaka Electro Communication Univ. (Japan)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems
F. Lanzl; H.-J. Preuss; G. Weigelt, Editor(s)

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