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Proceedings Paper

Laser vibrometer system to examine the dynamic modal analysis of resonant micromechanical structures
Author(s): David Wood; James S. Burdess; R. Pitcher; Alun J. Harris; Jane L. Cruickshank
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Paper Abstract

An interferometric system is described which can measure the dynamic performance of micromechanical structures. Modes of vibration and resonant frequencies are calculated for cantilevers and bridges which have been formed from boron-doped silicon. It is shown that a cantilever can be described by a beam model, whereas the bridge fits more appropriately to string behavior. This penomenon is explained by a cantilever, after annealing, being able to relieve the tension introduced at the doping stage. The fixed structure of the bridge is unable to accomodate this, however, and the doping-induced tension becomes the dominant factor in the structure's behavior.

Paper Details

Date Published: 19 September 1995
PDF: 9 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221277
Show Author Affiliations
David Wood, Univ. of Durham (United Kingdom)
James S. Burdess, Univ. of Newcastle-upon-Tyne (United Kingdom)
R. Pitcher, Univ. of Newcastle-upon-Tyne (United Kingdom)
Alun J. Harris, Univ. of Newcastle-upon-Tyne (United Kingdom)
Jane L. Cruickshank, Univ. of Newcastle-upon-Tyne (United Kingdom)

Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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