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Proceedings Paper

Electroplated nickel mold insert for LIGA
Author(s): Vikas Galhotra; Venkat Sangishetty; Evan Ma; Kevin W. Kelly
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Paper Abstract

The LIGA process is being developed at Louisiana State University (LSU) to mass produce high aspect ratio microstructures. One component of the LIGA process is the manufacture of mold inserts. The progress associated with manufacturing an electroplated nickel mold insert is described in this paper. Unique features of our nickel electrodeposition procedures are discussed.

Paper Details

Date Published: 19 September 1995
PDF: 6 pages
Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); doi: 10.1117/12.221273
Show Author Affiliations
Vikas Galhotra, Louisiana State Univ. (United States)
Venkat Sangishetty, Louisiana State Univ. (United States)
Evan Ma, Louisiana State Univ. (United States)
Kevin W. Kelly, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 2639:
Micromachining and Microfabrication Process Technology
Karen W. Markus, Editor(s)

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