Share Email Print

Proceedings Paper

Fabrication of plasmonic crystals using programmable nanoreplica molding process
Author(s): Longju Liu; Mohsin A. Badshah; Seok-min Kim; Meng Lu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The development of many photonic devices, such as photonic integrated circuit, optical sensors, and photovoltaic devices, demands low-cost and reliable fabrication technologies to fabricate sub-wavelength features. Here, we report a programmable nanoreplica molding process, which is capable of producing photonic devices with a variety of submicrometer patterns. The process utilizes a stretchable plastic mold to generate the desired periodic pattern using a UVcurable polymer on plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which locates on the surface of the mold. The geometry of the replicated pattern, including the lattice constant and arrangement, is determined by the magnitude and direction of the force. As an example, we present a plasmonic crystal device with surface plasmon resonances carefully tuned by using the uniaxial force. This unique process offers an inexpensive route to generate various periodic nanostructures rapidly.

Paper Details

Date Published: 14 March 2016
PDF: 6 pages
Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97591G (14 March 2016); doi: 10.1117/12.2212053
Show Author Affiliations
Longju Liu, Iowa State Univ. (United States)
Mohsin A. Badshah, Chung-Ang Univ. (Korea, Republic of)
Seok-min Kim, Chung-Ang Univ. (Korea, Republic of)
Meng Lu, Iowa State Univ. (United States)

Published in SPIE Proceedings Vol. 9759:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

© SPIE. Terms of Use
Back to Top