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Proceedings Paper

Characterization of non-conductive materials using field emission scanning electron microscopy
Author(s): Cong Cao; Ran Gao; Huayan Shang; Tingting Peng
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Paper Abstract

With the development of science and technology, field emission scanning electron microscope (FESEM) plays an important role in nano-material measurements because of its advantages of high magnification, high resolution and easy operation. A high-quality secondary electron image is a significant prerequisite for accurate and precise length measurements. In order to obtain high-quality secondary electron images, the conventional treatment method for non-conductive materials is coating conductive films with gold, carbon or platinum to reduce charging effects, but this method will cover real micro structures of materials, change the sample composition properties and meanwhile introduce a relatively big error to nano-scale microstructure measurements. This paper discusses how to reduce or eliminate the impact of charging effects on image quality to the greatest extent by changing working conditions, such as voltage, stage bias, scanning mode and so on without treatment of coating, to obtain real and high-quality microstructure information of materials.

Paper Details

Date Published: 26 January 2016
PDF: 7 pages
Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 990319 (26 January 2016); doi: 10.1117/12.2211862
Show Author Affiliations
Cong Cao, Shandong Institute of Metrology (China)
Ran Gao, Shandong Institute of Metrology (China)
Huayan Shang, Shandong Institute of Metrology (China)
Tingting Peng, Shandong Institute of Metrology (China)

Published in SPIE Proceedings Vol. 9903:
Seventh International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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