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Proceedings Paper

Silicon membrane gyroscope with electrostatic actuation and sensing
Author(s): David Wood; George Cooper; James S. Burdess; Alun J. Harris; Jane L. Cruickshank
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Paper Abstract

Presented here are preliminary results on a resonant gyroscope that is very simple to fabricate. It is made using both silicon and glass substrates, and involves the minimum of mask steps. Actuation and detection are all achieved via capacitive means. The minimum rotation rate that has been able to be sensed is 300 degrees/s; improvements in the manufacturing process could reduce this to as low as 0.07 degrees/s before the rate detection would become limited by electrical noise.

Paper Details

Date Published: 15 September 1995
PDF: 10 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221185
Show Author Affiliations
David Wood, Univ. of Durham (United Kingdom)
George Cooper, Univ. of Durham (United Kingdom)
James S. Burdess, Univ. of Newcastle upon Tyne (United Kingdom)
Alun J. Harris, Univ. of Newcastle upon Tyne (United Kingdom)
Jane L. Cruickshank, Univ. of Newcastle upon Tyne (United Kingdom)

Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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