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Proceedings Paper

Three-dimensional structures for micro-optical mechanical systems in standard CMOS
Author(s): Ezekiel J. Kruglick; Shirish Damle; Kristofer S. J. Pister
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Paper Abstract

A design is presented and tested to build and actuate reflection based 3D micro-opto- mechancial systems in standard CMOS using only a single maskless post-processing step. We have built two generations of structures and actuated them at various frequencies. The initial design uses the various components of CMOS to make a rigid box being pulled against the substrate. Results and photos are presented to show the actuation. Possible developments which take advantage of the CMOS underlying the structure are discussed.

Paper Details

Date Published: 15 September 1995
PDF: 7 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221176
Show Author Affiliations
Ezekiel J. Kruglick, Univ. of California/Los Angeles (United States)
Shirish Damle, Univ. of California/Los Angeles (United States)
Kristofer S. J. Pister, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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