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Proceedings Paper

ARROW-based integrated optical pressure sensors
Author(s): Kamel Benaissa; Arokia Nathan
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Paper Abstract

In this paper, we present a review of micromechanical Mach-Zehnder interferometer pressure sensors based on silicon integrated optics. The sensors are based on the ARROW waveguide structure and fabricated using IC compatible dielectrics.

Paper Details

Date Published: 15 September 1995
PDF: 6 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221175
Show Author Affiliations
Kamel Benaissa, Univ. of Waterloo (Canada)
Arokia Nathan, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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