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Proceedings Paper

Micromachined hydrocarbon-based gas sensors
Author(s): Ashok Srivastava; Naveen George; J. Cherukuri
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Paper Abstract

We report the technology for the design and fabrication of bulk-micromachined hydrocarbon based gas sensors in standard two micron n-well CMOS process. The hydrocarbon based gas sensor is a palladium-oxide-polysilicon type MOS structure. The gas sensor is realized in three steps: the layout design in CMOS technology using VLSI CAD tools, post-processing on fabricated CMOS devices followed by the deposition of palladium. The design includes additional layer in CMOS called 'open' which enables the formation of a 'cavity' in the silicon substrate and results in a micromachined structure. After the fabrication of CMOS devices a single maskless etch in an aqueous solution of ethylenediamine-pyrocatechol or xenon difluoride is done to create a 'cavity' followed by gas in palladium changes the C-V characteristics of the MOS structure and is detected through an integrated readout CMOS electronics.

Paper Details

Date Published: 15 September 1995
PDF: 9 pages
Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); doi: 10.1117/12.221160
Show Author Affiliations
Ashok Srivastava, Louisiana State Univ. (United States)
Naveen George, Louisiana State Univ. (United States)
J. Cherukuri, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 2642:
Micromachined Devices and Components
Ray M. Roop; Kevin H. Chau, Editor(s)

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