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Proceedings Paper

Miniature electrically tunable rotary dual-focus lenses
Author(s): Yongchao Zou; Wei Zhang; Tong Lin; Fook Siong Chau; Guangya Zhou
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Paper Abstract

The emerging dual-focus lenses are drawing increasing attention recently due to their wide applications in both academia and industries, including laser cutting systems, microscopy systems, and interferometer-based surface profilers. In this paper, a miniature electrically tunable rotary dual-focus lens is developed. Such a lens consists of two optical elements, each having an optical flat surface and one freeform surface. The two freeform surfaces are initialized with the governing equation Ar2θ (A is the constant to be determined, r and θ denote the radii and angles in the polar coordinate system) and then optimized by ray tracing technique with additional Zernike polynomial terms for aberration correction. The freeform surfaces are achieved by a single-point diamond turning technique and then a PDMS-based replication process is utilized to materialize the final lens elements. To drive the two coaxial elements to rotate independently, two MEMS thermal rotary actuators are developed and fabricated by a standard MUMPs process. The experimental results show that the MEMS thermal actuator provides a maximum rotation angle of about 8.2 degrees with an input DC voltage of 6.5 V, leading to a wide tuning range for both the two focal lengths of the lens. Specifically, one focal length can be tuned from about 30 mm to 20 mm while the other one can be adjusted from about 30 mm to 60 mm.

Paper Details

Date Published: 15 March 2016
PDF: 9 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600U (15 March 2016); doi: 10.1117/12.2211581
Show Author Affiliations
Yongchao Zou, National Univ. of Singapore (Singapore)
Wei Zhang, National Univ. of Singapore (Singapore)
Tong Lin, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)
Guangya Zhou, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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