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Proceedings Paper

Zero degree contour cutting below 100 µm feature size with femtosecond laser
Author(s): Klaus Stolberg; Susanna Friedel
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Paper Abstract

By the use of a 16 W femtosecond laser we demonstrate steep wall angles and small feature spacings for non-thermal melt-free laser drilling and contour cutting of 100 to 500 μm thick metals like Cu-alloy, stainless steel, titanium and tantalum as well as for ceramics and polymer (polycarbonate). Especially processing of thin materials is a challenge, because heat accumulation in thermal processing usually causes mechanical distortion or edge melting as well as material.

The combination of beam deflection in trepanning optics and sample motion allowed us to work in a special "laser milling mode" with rotating beam. Zero degree taper angle as well as positive or negative tapers can be achieved at micrometer scale.

Paper Details

Date Published: 4 March 2016
PDF: 9 pages
Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X, 97360F (4 March 2016); doi: 10.1117/12.2208809
Show Author Affiliations
Klaus Stolberg, JENOPTIK Laser GmbH (Germany)
Susanna Friedel, JENOPTIK Laser GmbH (Germany)

Published in SPIE Proceedings Vol. 9736:
Laser-based Micro- and Nanoprocessing X
Udo Klotzbach; Kunihiko Washio; Craig B. Arnold, Editor(s)

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