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Proceedings Paper

MEMS-based IR-sources
Author(s): Sebastian Weise; Bastian Steinbach; Steffen Biermann
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Paper Abstract

The series JSIR350 sources are MEMS based infrared emitters. These IR sources are characterized by a high radiation output. Thus, they are excellent for NDIR gas analysis and are ideally suited for using with our pyro-electric or thermopile detectors. The MEMS chips used in Micro-Hybrid’s infrared emitters consist of nano-amorphous carbon (NAC). The MEMS chips are produced in the USA. All Micro-Hybrid Emitter are designed and specified to operate up to 850°C. The improvements we have made in the source's packaging enable us to provide IR sources with the best performance on the market. This new technology enables us to seal the housings of infrared radiation sources with soldered infrared filters or windows and thus cause the parts to be impenetrable to gases.

Micro-Hybrid provide various ways of adapting our MEMS based infrared emitter JSIR350 to customer specifications, like specific burn-in parameters/characteristic, different industrial standard housings, producible with customized cap, reflector or pin-out.

Paper Details

Date Published: 14 March 2016
PDF: 7 pages
Proc. SPIE 9752, Silicon Photonics XI, 97521E (14 March 2016); doi: 10.1117/12.2208410
Show Author Affiliations
Sebastian Weise, Micro-Hybrid Electronic GmbH (Germany)
Bastian Steinbach, Micro-Hybrid Electronic GmbH (Germany)
Steffen Biermann, Micro-Hybrid Electronic GmbH (Germany)

Published in SPIE Proceedings Vol. 9752:
Silicon Photonics XI
Graham T. Reed; Andrew P. Knights, Editor(s)

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