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Proceedings Paper

Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications
Author(s): Ssu-Han Chen; Aron Michael; Chee Yee Kwok; Peng Wang
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Paper Abstract

This paper presents the design and simulation of a novel piezoelectric actuator integrated with on-chip piezoresistive sensors for micro-lens actuation. COMSOL Multiphysics is used to perform and facilitate the design and simulation. The actuator consists of eight d31 mode unimorph piezoelectric actuators symmetrically attached to a lens holding frame through springs at one end, and to the silicon substrate at the other end. Diffused p-Si piezoresistors with doping of 1x1018cm-3 are considered in the proposed design for displacement sensing of each micro-actuator. Results shows 3.2μm/V displacement sensitivity for the micro-lens actuator and piezoresistive sensitivity of 0.134mV/V/μm is obtainable with p-Si piezoresistors.

Paper Details

Date Published: 22 December 2015
PDF: 10 pages
Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96682C (22 December 2015); doi: 10.1117/12.2202502
Show Author Affiliations
Ssu-Han Chen, The Univ. of New South Wales (Australia)
Aron Michael, The Univ. of New South Wales (Australia)
Chee Yee Kwok, The Univ. of New South Wales (Australia)
Peng Wang, The Univ. of New South Wales (Australia)

Published in SPIE Proceedings Vol. 9668:
Micro+Nano Materials, Devices, and Systems
Benjamin J. Eggleton; Stefano Palomba, Editor(s)

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