Silicon photonics circuit has been widely investigated in recent years, due to its advantage in the small footprint, high density integration and compatible with CMOS pilot line. In this paper, a compact, highly-sensitivity NaCl concentration sensor is experimentally demonstrated, based on the micro-ring resonators. The sensor circuit is composed of grating couplers, bus waveguide and micro-ring resonators. The width of optical waveguides is 450nm, with a thickness of 220nm. The chip was fabricated in imec through the ePIXfab multi-project wafer service supported by our group, which is compatible with the CMOS process line. The chip shows high sensitivity, as high as of more than 80nm/RIU, which corresponding to a detection limit of 1.6e^-4 by using optical spectrum analyzer.

Date Published: 15 October 2015
PDF: 4 pages
Proc. SPIE 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology, 96742F (15 October 2015); doi: 10.1117/12.2201034

Published in SPIE Proceedings Vol. 9674:
AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology
Haimei Gong; Nanjian Wu; Yang Ni; Weibiao Chen; Jin Lu, Editor(s)