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Proceedings Paper

Tensile strained Ge0.90Sn0.10 photodiode integrated with Si3N4 liner stressor for mid-infrared applications
Author(s): Qingfang Zhang; Yan Liu; Chunfu Zhang; Yue Hao; Genquan Han
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Paper Abstract

In this paper, tensile strained Ge0.90Sn0.10 photodiode with different architectures integrated with Si3N4 liner stressor for mid-infrared applications are theoretically investigated. Ge0.90Sn0.10 fin and waveguide photodiodes wrapped in the Si3N4 liner stressor are designed and the strain distribution is studied by the finite element simulation. A large tensile strain is induced in Ge0.90Sn0.10 with the Si3N4 liner stressor expanding. The energy band structure of tensile strained Ge0.90Sn0.10 is calculated using k⋅p theory. The direct bandgap Eg,Γ of Ge0.90Sn0.10 under tensile strain is significantly reduced, which results in a large red shift of the cut-off wavelength of strained Ge0.90Sn0.10 devices. As the Si3N4 liner stressor expands by 1.5%, 25.1% and 48.7% reduction of Eg,Γ are achieved in tensile strained Ge0.90Sn0.10 fin and waveguide photodiodes, respectively, compared to the unstrained device. The cut-off wavelengths of tensile strained Ge0.90Sn0.10 fin and waveguide devices are extended to 3.68 μm and 5.37 μm, respectively. Introducing tensile strain into GeSn by tensile strain liner stressor provides an effective method for extending the detection spectrum of GeSn photodiodes to mid-infrared wavelength, e.g. 5μm.

Paper Details

Date Published: 15 October 2015
PDF: 6 pages
Proc. SPIE 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology, 96741B (15 October 2015); doi: 10.1117/12.2199377
Show Author Affiliations
Qingfang Zhang, Chongqing Univ. (China)
Yan Liu, Chongqing Univ. (China)
Chunfu Zhang, Xidian Univ. (China)
Yue Hao, Xidian Univ. (China)
Genquan Han, Chongqing Univ. (China)
Xidian Univ. (China)


Published in SPIE Proceedings Vol. 9674:
AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology
Haimei Gong; Nanjian Wu; Yang Ni; Weibiao Chen; Jin Lu, Editor(s)

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