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Proceedings Paper • Open Access

Front Matter: Volume 9428

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 9428, including the Title Page, Copyright information, Table of Contents, Authors, Introduction (if any), and Conference Committee listing.

Paper Details

Date Published: 23 April 2015
PDF: 10 pages
Proc. SPIE 9428, Advanced Etch Technology for Nanopatterning IV, 942801 (23 April 2015); doi: 10.1117/12.2193022
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Published in SPIE Proceedings Vol. 9428:
Advanced Etch Technology for Nanopatterning IV
Qinghuang Lin; Sebastian U. Engelmann; Ying Zhang, Editor(s)

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