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Proceedings Paper

Facility for fast mapping of total scattering and transmission in the spectral range from DUV- NIR
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Paper Abstract

A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production.

On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.

Paper Details

Date Published: 24 September 2015
PDF: 11 pages
Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280N (24 September 2015); doi: 10.1117/12.2191311
Show Author Affiliations
P. Kadkhoda, Laser Zentrum Hannover e.V. (Germany)
L. Jensen, Laser Zentrum Hannover e.V. (Germany)
D. Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 9628:
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Angela Duparré; Roland Geyl, Editor(s)

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